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SUMMARY:MEAM Seminar: "Engineering Microdevices Using Atomic Layer Deposition and Electrowetting"
DESCRIPTION:This talk will cover 1) devices created one atomic layer at a time and 2) electrowetting optical elements. Atomic layer deposition (ALD) and Atomic Layer Etching (ALE) are self-limiting processes that enable accurate atomic-scale thickness control either through deposition or etching of various materials. We are developing novel manufacturing processes that study how ALD materials can be used to create nano-scale transducers. Example applications include thin film coatings for MEMS\, materials with tunable properties\, nano-scale sensors and actuators. We are also developing liquid optical components based on the electrowetting effect\, where the contact angle of a liquid on a dielectric substrate changes due to applied voltage. Optical lenses and prisms can be fabricated as individual components or as arrays and are electrically addressed by transparent electrodes. By applying a voltage between the liquid and the substrate\, the droplet changes curvature and the liquid interface acts as a variable focus lens or using multiple drive electrodes as a prism. This phenomenon can be used for wavefront compensation in adaptive optics\, communications\, beam steering\, optical switching and microscopy.
URL:https://seasevents.nmsdev7.com/event/meam-seminar-multi-disciplinary-engineering-microsystems-group/
LOCATION:Wu and Chen Auditorium (Room 101)\, Levine Hall\, 3330 Walnut Street\, Philadelphia\, PA\, 19104\, United States
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